Abstract: This paper presents a fully packaged CMOS interdigital capacitive humidity sensor with polysilicon heaters. The sensor was fabricated with the industrial standard CMOS process and the MEMS ...

Abstract: This letter presents a flexible and disposable humidity sensor based on Poly(3,4-ethylenedioxythiophene): polystyrene sulfonate (PEDOT:PSS). The sensing layer is developed by drop casting ...